汎叡科技開始供應Linear Stage
單軸奈米高精度電動平台
目前有下列兩種行程
50mm 與 100mm
精度規格如下
更多資訊歡迎來電洽詢
Lead Screw Pitch Options |
Rotary Encoder
Resolution |
Maximum Speed
(Dynamic range = 100) |
25.40 mm (Ultra-coarse) |
88 nm |
28 mm/sec |
12.70 mm (Super-coarse) |
44 nm |
14 mm/sec |
6.35 mm (Standard) |
22 nm |
7 mm/sec |
1.59 mm (Fine) |
5.5 nm |
1.75 mm/sec |
0.635 mm (Extra-fine) |
2.2 nm |
0.7 mm/sec |
0.317 mm (Ultra-fine) |
1.1 nm |
0.35 mm/sec |
Standard (6.35 mm) Lead Screw Accuracy is 0.25 μm per millimeter
Linear Encoder Option
選購線性光學尺
重複精度Repeatability |
Resolution |
Scale Accuracy |
< 300 nm (typ) |
10 nm |
± 3 μm per length of scale |
|